A microcantilever is a suspended micro-scale beam structure supported at one end which
can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most …

Nanomechanical biosensing relies on changes in the movement and deformation of micro-
and nanoscale objects when they interact with biomolecules and other biological targets …

Frequency stability is key to the performance of nanoresonators. This stability is thought to
reach a limit with the resonator's ability to resolve thermally induced vibrations. Although …

We describe and demonstrate a new oscillator topology, the parametric feedback oscillator
(PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices and opens …

Actuation and sensors for driving and monitoring of cantilever beam system are of most
significant in the field of micro-electro-mechanical systems (MEMS). However, the AC …

Optical beam deflection (OBD) is the most prevalent method for measuring cantilever
deflections in atomic force microscopy (AFM), mainly due to its excellent noise performance …

The resonant characteristics of a mechanical resonator immersed in liquid provide valuable
parameters for density and viscosity sensing. In particular, the combination of …

Micro-and nano-electromechanical systems (M/NEMS) have demonstrated outstanding
sensing capabilities down to the yoctogram () scale in vacuum environment and cryogenic …

Flexoelectricity is an electromechanical effect coupling polarization to strain gradients. It
fundamentally differs from piezoelectricity because of its size-dependence and symmetry …

This work shows a preliminary microfabrication route for a novel directional hydrophone
based on a cross-shaped design of piezoelectric cantilevers. A thin layer of aluminum nitride …