Single device on-chip feedthrough cancellation for enhanced electrical characterization of piezoelectric-on-silicon resonators in liquid

A Ali, JEY Lee - Sensors and Actuators A: Physical, 2017 - Elsevier
Even though piezoelectric MEMS resonators are known to possess substantially stronger
electromechanical transduction efficiencies than the more traditional capacitive MEMS …

Phase-noise reduction in a CMOS-MEMS oscillator under nonlinear MEMS operation

A Uranga, G Sobreviela, M Riverola… - … on Circuits and …, 2017 - ieeexplore.ieee.org
In this paper, we will present an all-CMOS oscillator based on monolithically integrated
MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology …

Analysis and Compensation of Electrical Feedthrough Effect on Scale Factor of Force-to-rebalanced MEMS Gyroscopes

X Ding, Q Xu, X Ge, X Liu, L Zhao, H Li - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
In this article, we report an analytic model describing the phenomenon that, if electrical
feedthrough exists between the actuating and the readout electrodes of the sense mode, the …

Feedthrough effect in MEMS gyroscopes and fully differential feedthrough cancellation method

Y Wu, C Fan, L Gu, M Liu, X Wu, F Cui - Review of Scientific …, 2024 - pubs.aip.org
In the operation of MEMS gyroscopes, the feedthrough signal is inevitably introduced
through the feedthrough capacitance and significantly affects the performance of MEMS …

Adaptive cancellation of parasitic coupling

HG Howard, AH Behbahani, JS Gibson… - Journal of …, 2018 - ieeexplore.ieee.org
This paper reports a signal processing technique that adaptively identifies a finite-impulse-
response (FIR) model of the parasitic coupling between the input ports and the output ports …

Intrinsic feedthrough current cancellation in a seesaw CMOS-MEMS resonator for integrated oscillators

M Riverola, G Sobreviela, A Uranga… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
The parasitic feedthrough capacitance that inherently appears in capacitive transduced
MEMS resonators presents two main drawbacks: it partially, or even totally, masks the …

The influence of the parasitic current on the nonlinear electrical response of capacitively sensed cantilever resonators

G Vidal-Álvarez, F Torres, N Barniol… - Journal of Applied …, 2015 - pubs.aip.org
The influence of the parasitic feedthrough current on the nonlinear electrical response of
capacitively sensed cantilever resonators is analyzed theoretically and experimentally. We …

The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams

G Vidal-Álvarez, F Torres, N Barniol… - 2014 Symposium on …, 2014 - ieeexplore.ieee.org
The influence of the parasitic current on the nonlinear electrical response of capacitive
sensed cantilever beams is analyzed both theoretically and experimentally. We show that …

Modélisation des phénomènes non-linéaires dans un capteur MEMS résonant pour l'optimisation de ses performances et de sa fiabilité

A Brenes - 2016 - theses.hal.science
L'utilisation des technologies MEMS dans la navigation aéronautique présente deux
difficultés majeures. D'une part, le bon fonctionnement des appareils de mesure de l'aviation …

[PDF][PDF] Parte A. DATOS PERSONALES

O Discreta - Annals of Operations Research, 2016 - personal.uca.es
Dentro de la línea de investigación de Localización Discreta hemos desarrollado diversos
procedimientos (en su mayor parte exactos) de resolución de problemas-clásicos y …