[HTML][HTML] Selecting alternative metals for advanced interconnects

JP Soulié, K Sankaran, B Van Troeye… - Journal of Applied …, 2024 - pubs.aip.org
Interconnect resistance and reliability have emerged as critical factors limiting the
performance of advanced CMOS circuits. With the slowdown of transistor scaling …

[HTML][HTML] Hexagons on rectangles: Epitaxial graphene on Ru101‾ 0

L Buß, G Zamborlini, C Sulaiman, M Ewert, M Cinchetti… - Carbon, 2025 - Elsevier
Ruthenium is emerging as a promising candidate to replace copper in highly integrated
electronics by enabling barrierless metallization in ultrathin interconnects. From this …

Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process

CY Kuo, JH Zhu, YP Chiu, IC Ni, MH Chen, YR Wu… - Nano Letters, 2024 - ACS Publications
The graphene-all-around (GAA) structure has been verified to grow directly at 380° C using
hot-wire chemical vapor deposition, within the thermal budget of the back end of the line …

Graphene-based interconnect exploration for large SRAM caches for ultrascaled technology nodes

Z Pei, M Mayahinia, HH Liu, M Tahoori… - … on Electron Devices, 2022 - ieeexplore.ieee.org
Graphene-based interconnects are considered promising replacements for traditional
copper (Cu) interconnect due to their great electric properties. In this article, an interconnect …

Van der Waals Epitaxy of c-Oriented Wurtzite AlGaN on Polycrystalline Mo Substrates for Enhanced Heat Dissipation

Y Chen, H Zang, S Zhang, Z Shi, J Ben… - … Applied Materials & …, 2022 - ACS Publications
The epitaxy of III-nitrides on metallic substrates is competitive due to the advantages of
vertical carrier injection, enhanced heat dissipation, and flexible application in various III …

AlGaN UV Detector with Largely Enhanced Heat Dissipation on Mo Substrate Enabled by van der Waals Epitaxy

Y Chen, H Zang, J Ben, S Zhang, K Jiang… - Crystal Growth & …, 2022 - ACS Publications
The epitaxy of AlGaN on metallic substrates exhibits numerous advantages including
flexibility, vertical carrier injection, and enhanced heat dissipation for optoelectronic devices; …

Ultra-Scaled E-Tree-Based SRAM Design and Optimization With Interconnect Focus

Z Pei, HH Liu, M Mayahinia, MB Tahoori… - … on Circuits and …, 2024 - ieeexplore.ieee.org
SRAM performance is highly dominated by interconnects as technology scales down
because of the significant parasitic resistance and capacitance in the interconnect. This …

Ultrascaled graphene-capped interconnects: a quantum mechanical study

P Reyntjens, M Van de Put… - … (IITC) and IEEE …, 2023 - ieeexplore.ieee.org
In this theoretical study, we assess the impact of a graphene cap** layer on the resistivity
of defective, extremely scaled interconnects. We investigate the effect of graphene cap** …

Beyond-Cu intermediate-length interconnect exploration for SRAM application

Z Pei, F Catthoor, Z Tokei, C Pan - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Promising interconnect materials continue to emerge and are considered as potential
replacements for Cu interconnects. In this paper, an intermediate-length interconnect …

Technology/memory co-design and co-optimization using E-Tree interconnect

Z Pei, M Mayahinia, HH Liu, M Tahoori… - Proceedings of the …, 2023 - dl.acm.org
For on-chip SRAM, a major portion of delay and energy is contributed by the H-Tree
interconnects. In this paper, we propose an E-Tree interconnect technology to minimize the …