Advances in microfabrication technology have enabled micromechanical systems (MEMS)
to become a core component in a manifold of applications. For many of these applications …

In this work, we demonstrate the potential of a piezoelectric resonator for develo** a low-
cost sensor system to detect microscopic particles in real-time, which can be present in a …

This paper offers a critical overview of recent advancements in aqueous sensors for heavy
metals. The paper focuses on the challenges and advantages of using …

This paper reports on the dynamic viscosity analysis of bituminous materials with
piezoelectric MEMS plate-type resonators. To enable measurements even under such …

In this work, a comprehensive characterization of metal-insulator-semiconductor structures
by impedance spectroscopy is demonstrated for the case of electrically insulating, highly c …

This work reports on a resonantly operated piezoelectric MEMS strain sensor based on a
microbridge structure. The resonator is excited with a sputtered aluminum nitride layer and …

We report the use of two AlN-based piezoelectric microresonators for the monitoring of
density and viscosity of liquids and its application to detect lubricant oil dilution with diesel …

The new industry requires embedded sensor systems that can monitor processes and
address issues quickly and intelligently. These devices must operate efficiently at any stage …

Micromachined resonators completely submerged in liquids suffer from high viscous
dam** and low measurement signals compared to the operation in gaseous environment …

In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip
is used for sensing surface-related properties. When targeting the integration of AFMs into …