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Fin field effect transistor, semiconductor device and fabricating method thereof
CC Chang, CH Lin, HH Tseng - US Patent 10,020,304, 2018 - Google Patents
(57) ABSTRACT A substrate is patterned to form trenches and a semiconduc tor fin between
the trenches. Insulators are formed in the trenches and a first dielectric layer is formed to …
the trenches. Insulators are formed in the trenches and a first dielectric layer is formed to …
Structure and method to increase contact area in unmerged EPI integration for CMOS FinFETs
VS Basker, K Cheng, A Khakifirooz - US Patent 9,362,285, 2016 - Google Patents
Source/drain contact structures with increased contact areas for a multiple fin-based
complementary metal oxide semicon ductor field effect transistor (CMOSFET) having …
complementary metal oxide semicon ductor field effect transistor (CMOSFET) having …
Semiconductor device structures and arrays of vertical transistor devices
GS Sandhu - US Patent 9,356,155, 2016 - Google Patents
(57) ABSTRACT A semiconductor device structure is disclosed. The semicon ductor device
structure includes a mesa extending above a Substrate. The mesa has a channel region …
structure includes a mesa extending above a Substrate. The mesa has a channel region …
Nanowire channel structures of continuously stacked nanowires for complementary metal oxide semiconductor (CMOS) devices
JJ Xu, SS Song, D Yang, V Machkaoutsan… - US Patent …, 2018 - Google Patents
Nanowire channel structures of continuously stacked nanowires for complementary metal
oxide semiconductor (CMOS) devices are disclosed. In one aspect, an exemplary CMOS …
oxide semiconductor (CMOS) devices are disclosed. In one aspect, an exemplary CMOS …
Fin field effect transistor and method for fabricating the same
CC Chang, CH Lin - US Patent 9,773,871, 2017 - Google Patents
(57) ABSTRACT A FinFET includes a substrate, a plurality of insulators disposed on the
substrate, a gate stack and a strained material. The substrate includes at least one …
substrate, a gate stack and a strained material. The substrate includes at least one …
Semiconductor device including strained finFET
(57) ABSTRACT A semiconductor device includes at least one semiconductor fin on an
upper Surface of a base Substrate. The at least one semiconductor fin includes a strained …
upper Surface of a base Substrate. The at least one semiconductor fin includes a strained …
Methods for forming integrated circuits with reduced replacement metal gate height variability
GP Wells, YH Liu, K Trevino, CH Maeng… - US Patent App. 13 …, 2015 - Google Patents
Methods for fabricating integrated circuits with reduced replacement metal gate height
variability are provided. In an embodiment, a method includes providing a semiconductor …
variability are provided. In an embodiment, a method includes providing a semiconductor …
Gate cut in replacement metal gate process
C Park, R **e, K Cheng, L Economikos - US Patent 10,373,873, 2019 - Google Patents
Gate isolation methods and structures for a FinFET device leverage the definition and
formation of a gate cut opening within a sacrificial gate layer prior to patterning the sacri ficial …
formation of a gate cut opening within a sacrificial gate layer prior to patterning the sacri ficial …
Semiconductor devices and structures and methods of formation
GS Sandhu - US Patent 10,002,935, 2018 - Google Patents
A semiconductor device structure is disclosed. The semi-conductor device structure includes
a mesa extending above a substrate. The mesa has a channel region between a first side …
a mesa extending above a substrate. The mesa has a channel region between a first side …
Stable work function for narrow-pitch devices
BACKGROUND 0001 Technical Field 0002 The present invention relates to semiconductor
devices, and more particularly to devices and methods for fabricating Such devices with …
devices, and more particularly to devices and methods for fabricating Such devices with …