This paper reports a novel capacitive humidity sensor integrated on a polysilicon heater. The
sensor was fabricated with the industrial standard CMOS process to achieve a cost-effective …

Advances in the field of micro electro mechanical systems and their uses now offer unique
opportunities in the design of ultrasensitive analytical tools. The analytical community …

This paper presents a novel technique for the fabrication of a micro humidity sensor with
suspending structures. A MEMS device is developed which uses thin-film platinum resistors …

This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …

In this paper the design considerations, fabrication and first evaluation results of a capacitive
type single chip chemical sensor array based on interdigitated electrode structure is …

Recent innovation in microelectrical-mechanical systems (MEMSs) and plasmonics-based
technologies has opened up perspectives for label-free sensing of biological and chemical …

Because of unique water properties, humidity affects many living organisms, including
humans and materials. Humidity control is important in various fields, from production …

We present the design, fabrication, and response of a polymer-based Laterally Amplified
Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and …

Because of unique water properties, humidity affects materials and many living organisms,
including humans. Humidity control is important in various fields, from production …

The-Al2O3 sensor has low sensitivity, and its capacitance value only slightly changes in low-
humidity environment. To improve the characteristics of such sensors in the field of low …