Review on experimental and theoretical investigations of ultra-short pulsed laser ablation of metals with burst pulses

DJ Förster, B Jäggi, A Michalowski… - Materials, 2021 - mdpi.com
Laser processing with ultra-short double pulses has gained attraction since the beginning of
the 2000s. In the last decade, pulse bursts consisting of multiple pulses with a delay of …

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

M Chambonneau, D Grojo, O Tokel… - Laser & Photonics …, 2021 - Wiley Online Library
Laser direct writing is a widely employed technique for 3D, contactless, and fast
functionalization of dielectrics. Its success mainly originates from the utilization of ultrashort …

A review of laser ablation and dicing of Si wafers

MR Marks, KY Cheong, Z Hassan - Precision Engineering, 2022 - Elsevier
Over the last decade, lasers have been gradually employed for Si wafer dicing to replace
blade dicing. Laser dicing has the potential to replace blade dicing as the future generation …

Transmission laser welding of similar and dissimilar semiconductor materials

P Sopeña, A Wang, A Mouskeftaras… - Laser & Photonics …, 2022 - Wiley Online Library
Laser micro‐welding is an advanced manufacturing method today applied in various
domains. However, important physical limitations have prevented so far to demonstrate its …

Pulse-duration dependence of laser-induced modifications inside silicon

A Das, A Wang, O Uteza, D Grojo - Optics Express, 2020 - opg.optica.org
The advent of ultrafast infrared lasers provides a unique opportunity for direct fabrication of
three-dimensional silicon microdevices. However, strong nonlinearities prevent access to …