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Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application
Z Deng, H Wei, S Fan, J Gan - Microsystem Technologies, 2016 - Springer
In this paper, we design and analysis a new RF MEMS switched capacitor that exhibits low
pull in voltage. We propose a capacitance calculation method based on conformal map** …
pull in voltage. We propose a capacitance calculation method based on conformal map** …
High-power RF MEMS switched capacitors using a thick metal process
This paper presents the design and characterization of a high-power RF
microelectromechanical systems switched capacitor. The switch is based on a 4-μm-thick …
microelectromechanical systems switched capacitor. The switch is based on a 4-μm-thick …
A novel vertical comb-drive electrostatic actuator using a one layer process
This paper presents the design, fabrication and testing of a new residual stress gradient
based vertical comb-drive actuator. Conventional vertical comb-drive actuators need two …
based vertical comb-drive actuator. Conventional vertical comb-drive actuators need two …
A new RF MEMS capacitive switch for K-band application
H Wei, S Jia, F Zhao, L Dang, G Liang, Y Xu… - Progress In …, 2019 - jpier.org
This paper proposes a novel RF MEMS capacitive shunt switch, which is applied in K-band
(18~ 26.5 GHz). The characteristic impedance matching of the RF MEMS switch is achieved …
(18~ 26.5 GHz). The characteristic impedance matching of the RF MEMS switch is achieved …