Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application

Z Deng, H Wei, S Fan, J Gan - Microsystem Technologies, 2016 - Springer
In this paper, we design and analysis a new RF MEMS switched capacitor that exhibits low
pull in voltage. We propose a capacitance calculation method based on conformal map** …

High-power RF MEMS switched capacitors using a thick metal process

H Zareie, GM Rebeiz - IEEE transactions on microwave theory …, 2012 - ieeexplore.ieee.org
This paper presents the design and characterization of a high-power RF
microelectromechanical systems switched capacitor. The switch is based on a 4-μm-thick …

A novel vertical comb-drive electrostatic actuator using a one layer process

Z Hailu, S He, RB Mrad - Journal of Micromechanics and …, 2014 - iopscience.iop.org
This paper presents the design, fabrication and testing of a new residual stress gradient
based vertical comb-drive actuator. Conventional vertical comb-drive actuators need two …

A new RF MEMS capacitive switch for K-band application

H Wei, S Jia, F Zhao, L Dang, G Liang, Y Xu… - Progress In …, 2019 - jpier.org
This paper proposes a novel RF MEMS capacitive shunt switch, which is applied in K-band
(18~ 26.5 GHz). The characteristic impedance matching of the RF MEMS switch is achieved …