Development of the ReaxFF reactive force field for Cu/Si systems with application to copper cluster formation during Cu diffusion inside silicon

K Akbari Roshan, M Khajeh Talkhoncheh… - The Journal of …, 2021 - ACS Publications
Transition-metal impurities such as nickel, copper, and iron in solid-state materials like
silicon have a significant impact on the electrical performance of integrated circuits and solar …

Effect of heat treatment on the diffusion intermixing and structure of the Cu thin film on Si (111) substrate: a molecular dynamics simulation study

V Plechystyy, I Shtablavyi, S Winczewski… - Molecular …, 2021 - Taylor & Francis
This work is devoted to the study of the diffusion process at the interface between copper
films with a thickness of 2, 3, 4, 7 and 10 atomic monolayers and silicon substrate by …

[BUCH][B] Development and Application of a ReaxFF Reactive Force Field for Copper and Copper Oxide Interactions With Silicon via Neural Network Based …

KA Roshan - 2023 - search.proquest.com
Transition metal impurities such as nickel, copper, and iron in solid-state materials like
silicon have a significant impact on the electrical performance of integrated circuits and solar …

Development And Application Of A ReaxFF Reactive Force Field For Copper And Copper Oxide Interactions With Silicon Via Neural Network Based Parameterization …

K Akbari Roshan - 2023 - etda.libraries.psu.edu
Transition metal impurities such as nickel, copper, and iron in solid-state materials like
silicon have a significant impact on the electrical performance of integrated circuits and solar …