This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

The geometric designs of MEMS devices can profoundly impact their physical properties
and eventual performances. However, it is challenging for researchers to rationally consider …

This paper reports on a new type of high-frequency mode-matched gyroscope with
significantly reduced dependencies on environmental stimuli such as temperature, vibration …

The quality factor of a resonator represents the decay of vibrational energy over time, and is
directly related to the frequency response and other key parameters that determine …

Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

This work presents a high-performance Lamé mode resonator with high Q values. The
anchor loss and thermoelastic dam** (TED) were effectively decreased with the optimized …

The dynamic response of a structure is a manifestation of its inherent characteristics,
including material density, mechanical modulus, thermo-and viscoelastic properties, and …

Dam** is a critical design parameter for miniaturized mechanical resonators used in
microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS) …