The preparation and applications of graphene (G)-based materials are attracting increasing
interests due to their unique electronic, optical, magnetic, thermal, and mechanical …

Micro-and nanoelectromechanical systems have numerous applications in sensing and
signal transduction. Many properties benefit from reducing the system size to the nanoscale …

Nanoelectromechanical systems (NEMS) that operate in the megahertz (MHz) regime allow
energy transducibility between different physical domains. For example, they convert optical …

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are
attractive for fundamental research and applications. However, it is challenging to maintain …

We investigate periodic optomechanical arrays as reconfigurable platforms for engineering
the coupling between multiple mechanical and electromagnetic modes and for exploring …

A unique feature of two-dimensional (2D) materials is the ultralow friction at their van der
Waals interfaces. A key question in a new generation of 2D heterostructure-based …

We utilize the excellent mechanical properties of epitaxial silicon carbide (SiC) on silicon
plus the capability of tuning its residual stress within a large tensile range to fabricate …

Currently proven methods that are used to obtain devices with high-quality graphene on
silicon wafers involve the transfer of graphene flakes from a growth substrate, resulting in …

Epitaxial silicon carbide is promising for chemical resonant sensing applications due to its
excellent mechanical, thermal, and biochemical properties. This paper reviews six important …

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN)
micromembrane resonators are widely used in force and mass sensing applications …