Improvement of Zr-N diffusion barrier performance in Cu metallization by insertion of a thin...

Oxidation behavior and structural transformation of multifunctional (TiZrHf) N coatings

DC Tsai, ZC Chang, EC Chen, YL Huang… - Surface and Coatings …, 2025 - Elsevier
The study aims to explore the oxidation behavior of (TiZrHf) N films deposited using a
reactive magnetron sputtering system followed by an annealing process in air at …
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