[PDF][PDF] The effect of substrate bias voltage on the properties of Al-doped ZnO films deposited by magnetron sputtering

AI Ievtushenko, VA Karpyna… - Semiconductor …, 2024 - journal-spqeo.org.ua
Our work aims to investigate the influence of substrate bias voltage on the structure, optical,
and electrical properties of ZnO: Al thin films deposited on Si (100) and glass substrates by …

Metal oxide thin films for optoelectronic applications

EL Balada - 2024 - orbit.dtu.dk
Cutting-edge technologies constantly evolve driven by the societal need towards
development and sustainability. Device miniaturization, internet-of-things, wireless …