This article reports a mode-localized mass sensor based on thermal-actuation piezoresistive-
detection self-oscillated weakly coupled resonators. Detailed theoretical models and …

In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was
fabricated using a solvent-free method. The solvent-free method avoids the use of solvents …

Thermal-actuation and piezoresistive-detection effects have been employed to pump the
effective quality factor of MEMS resonators, targeting simple self-oscillation and better …

This paper reports a self-sustained thermal-actuation piezoresistive-detection oscillator with
boosted startup time and quality (Q) factor in the order of a million. A high Q-factor is an …

This paper investigates the dependence of frequency stability over temperature on support
tethers in dual-beam piezoresistive length-extensional (LE) mode microelectromechanical …

Thermal-actuation and piezoresistive-detection effects have been employed to pump the
effective quality factor of MEMS resonators, targeting better mass sensing performance in …

The thermal-piezoresistive effect in silicon (Si) has attracted great attention toward high-
performance resonant devices but still faces major challenges for harsh environment …

This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-
sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of …

A microelectromechanical systems (MEMS) rotary micro-gripper incorporating
electrothermal force sensors is reported. The device is fabricated using a standard SOI …