The design and fabrication techniques for microelectromechanical systems (MEMS) and
nanodevices are progressing rapidly. However, due to material and process flow …

Purpose–Virtual voxels (3D pixels) have traditionally been used as a graphical data
structure for representing 3D geometry. The purpose of this paper is to study the use of pre …

Ever since the genesis of life, and throughout the course its further evolution, Nature has
constantly been called upon to act as an engineer in solving technical problems. Organisms …

We have demonstrated the fluidic self-assembly of micromachined silicon parts onto silicon
and quartz substrates in a preconfigured pattern with submicrometer positioning precision …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …

This paper describes a novel microassembly system that can be used to construct out-of-
plane three-dimensional (3-D) microstructures. The system makes use of a surface …

In the microworld, as well as in the macroworld, assembly is a crucial operation in the
genesis of a product. This keynote paper focusses on the assembly problems occurring in …

This paper presents an innovative driving method for an on-chip robot actuated by
permanent magnets in a microfluidic chip. A piezoelectric ceramic is applied to induce …

Microassembly promises to extend MEMS beyond the confines of silicon micromachining.
This paper surveys research in both serial and parallel microassembly. The former extends …

A technique is described for assembly of multiple batches of micro components onto a single
substrate. The substrate is prepared with hydrophobic alkanethiol-coated gold binding sites …