Multiple-surface interferometry of highly reflective wafer by wavelength tuning

Y Kim, K Hibino, R Hanayama, N Sugita… - Optics Express, 2014 - opg.optica.org
The surface shape and optical thickness variation of a lithium niobate (LNB) wafer were
measured simultaneously using a wavelength-tuning interferometer with a new phase …

Theory and application of robust linear phase-shift algorithm for phase-shift deflectometry method

S Yang, X Zhu, Z Cao, J Zhao, X ** with a pulsed laser and modulation of polarization: application to speckle interferometry
G Rodríguez-Zurita, A García-Arellano… - Optics express, 2015 - opg.optica.org
For applications involving time varying optical phase distributions, fast cameras and/or
pulsed lasers have to be used. To apply phase–shifting interferometry techniques (PSI) as …

Interferometric thickness assessment of optical flat by combining iterative analysis and wavelength tuning

S Kim, Y Kim, K Hibino, N Sugita, M Mitsuishi - Optik, 2022 - Elsevier
During the thickness assessment of an optical flat with wavelength-tuning interferometry, the
second-order harmonics generated by double reflection inside the optical flat and nonlinear …