Semiconductor industry's transformation path under circular economy: Evidence from micro-level efficiency evaluation

Y Pan, Y Song, CC Zhang, Q Zhu, J Wu - Computers & Industrial …, 2024 - Elsevier
Semiconductors are the cornerstone of rapid information flow in the circular economy era
and are crucial for society as a whole. Improving the efficiency and achieving sustainable …

Turning logs into lumber: preprocessing tasks in process mining

Y Liu, V Stein Dani, I Beerepoot, X Lu - International Conference on …, 2023 - Springer
Event logs are invaluable for conducting process mining projects, offering insights into
process improvement and data-driven decision-making. However, data quality issues affect …

Development of a suspiciousness measure with reduced redundancy for screening machine sets in serial-parallel multistage manufacturing processes

SH Choi, DH Lee, YM Bae, KJ Kim - Expert Systems with Applications, 2025 - Elsevier
In serial–parallel multistage manufacturing processes (SP-MMPs), identifying root cause
machine sets (MSs) that contribute to defective product production is crucial for improving …

Exploiting a combined process mining approach to enhance the discovery and analysis of support processes in manufacturing

G Lugaresi, AD Ciappina, M Rossi… - International Journal of …, 2023 - Taylor & Francis
Recently, production plants have become very complex environments, in which the final
output is the result of the favourable interplay of several processes. Successful production …

Manufacturing process analysis framework for process mining: case study of fully automated factory applications

Y Lee, J Shin, W Lee - The International Journal of Advanced …, 2025 - Springer
This paper presents a data-driven approach to improving the productivity of manufacturing
companies operating under Make-To-Order (MTO). In this study, a comprehensive analysis …

Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry

J Li, HF Kuo - IEEE Transactions on Semiconductor …, 2024 - ieeexplore.ieee.org
The continuous miniaturization of semiconductor devices has increased the demand for
advanced process control technologies. This process requires real-time measurement …

Quality-aware resource model discovery

M Cho, G Park, M Song, J Lee, E Kum - Applied Sciences, 2021 - mdpi.com
Context-aware process mining aims at extending a contemporary approach with process
contexts for realistic process modeling. Regarding this discipline, there have been several …

A taxonomy of log preprocessing techniques in process mining

Y Liu - 2024 - studenttheses.uu.nl
Context-Process Mining is a discipline that intersects business process management and
data science. Event logs are extracted from information systems and analyzed through …

A Data-Driven Methodology for Analyzing Field Nonconformities in Semiconductor Production Applied to a Brazilian Manufacturer

JM de Souza, GM de Holanda, F Cristófani… - Brazilian Technology …, 2022 - Springer
The stages of the semiconductor production chain range from design and production to field
monitoring and customer service. Failure analysis of products on the market is essential to …

Graphical approach of equipment health monitoring using network analysis

W Ki, M Choi, Y Lee, J Park, K Yoon… - 2023 34th Annual …, 2023 - ieeexplore.ieee.org
As semiconductor devices become more complex, the amount of sensor data from
manufacturing equipment also increases, resulting in an increase in the number of abnormal …