MEMS sensor for detection and measurement of ultra-fine particles

V Pachkawade, Z Tse - Engineering Research Express, 2022‏ - iopscience.iop.org
This paper investigates the performance of the micro-electro-mechanical systems resonant
sensor used for particle detection and concentration measurement. The fine and ultra-fine …

A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity

S Tiwari, A Dangi, R Pratap - Microsystems & nanoengineering, 2023‏ - nature.com
We report a non-resonant piezoelectric microelectromechanical cantilever system for the
measurement of liquid viscosity. The system consists of two PiezoMEMS cantilevers in-line …

[HTML][HTML] Novel resonant MEMS sensor for the detection of particles with dielectric properties in aged lubricating oils

F Patocka, C Schneidhofer, N Dörr, M Schneider… - Sensors and Actuators A …, 2020‏ - Elsevier
We present a novel resonant MEMS sensor for the detection of particles with dielectric
properties in liquid environments. The sensor consists of a piezoelectrically excited silicon …

Machine learning techniques for the estimation of viscosity and density of aqueous solutions in piezo-actuated 3D-printed cells

V Corsino, V Ruiz-Díez, JM Gilpérez… - Sensors and Actuators A …, 2023‏ - Elsevier
Abstract Systems that combine sensor networks collecting environmental data with
advanced artificial intelligence algorithms play an important role in modern industry …

3D-printed liquid cell resonator with piezoelectric actuation for in-line density-viscosity measurements

J Toledo, V Ruiz-Díez, J Velasco, J Hernando-García… - Sensors, 2021‏ - mdpi.com
The in-line monitoring of liquid properties, such as density and viscosity, is a key process in
many industrial areas such as agro-food, automotive or biotechnology, requiring real-time …

A geometrical study on the roof tile-shaped modes in AlN-based piezoelectric microcantilevers as viscosity–density sensors

V Ruiz-Díez, J Toledo, J Hernando-García, A Ababneh… - Sensors, 2019‏ - mdpi.com
Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their
suitability for liquid media monitoring applications. The early studies have shown that certain …

Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor

L Gan, S Choudhary, K Reddy, C Levine, L Jander… - Actuators, 2024‏ - mdpi.com
An efficient and inexpensive post-process method to waterproof an electrically actuated
microtransducer has been studied. The electrical signals of microtransducers operating in …

MEMS sensor for detection and measurement of ultra-fine particles: A review

V Pachkawade, Z Tse - arxiv preprint arxiv:2112.09837, 2021‏ - arxiv.org
This paper investigates the performance of the micro-electro-mechanical systems resonant
sensor used for particle detection and concentration measurement. These fine and ultra-fine …

Piezoelectric actuated glass plate for liquid density and viscosity measurement

B Neff, F Casset, A Millet, V Agache, M Colin - Micromachines, 2020‏ - mdpi.com
This paper reports on a new system for liquid density and viscosity measurement based on a
freely suspended rectangular vibrating plate actuated by piezoelectric ceramic (PZT) …

Resonant MEMS sensors for real-time oil condition monitoring

F Patocka - 2024‏ - repositum.tuwien.at
In this thesis the application of resonant MEMS (micro-electromechanical Systems)
cantilevered sensors for condition monitoring of lubricating oil is studied. This work is …