In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …

Micro-and nanoscale materials have remarkable mechanical properties, such as enhanced
strength and toughness, but they usually display sample-to-sample fluctuations and size …

A novel electrostatic micromachined pump for medical applications is designed and
simulated. The proposed structure for the micropump consists of an input and an output port …

Two new types of on-chip tests have been designed in order to evaluate the elastic Young
modulus and the fracture strength of polysilicon used in microelectromechanical systems …

Silicon, as a single-crystal semiconductor, has brought about a great revolution in the field of
electronics and has touched almost all fields of science and technology. Though available …

The ability to measure pressure changes inside different components of a living cell is
important, because it offers an alternative way to study fundamental processes that involve …

Sensing systems-on-chip (SSoCs), combining micromachined sensing structures and
microelectronic building blocks on a single chip, are reviewed. While single-chip pressure …

MEMS pressure sensor fabrication introduce a number of challenges to handle the
processed wafers in batch fabrication after bulk-micromachining. In this paper, fabrication …

Microfabricated cantilevers have enabled a wide range of applications in scanning probe
microscopies (SPM) and in high-sensitivity nanomechanical sensors. The use of …

This paper describes a tunable MEMS electrostatic accelerometer that uses a repulsive
electrode configuration so that the design is not hampered by capacitive pull-in instability …