[HTML][HTML] PEDOT: PSS: From conductive polymers to sensors

X Zhang, W Yang, H Zhang, M **e… - … and Precision Engineering …, 2021 - pubs.aip.org
PEDOT: PSS conductive polymers have received tremendous attention over the last two
decades owing to their high conductivity, ease of processing, and biocompatibility. As a …

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

OO Versolato, J Sheil, S Witte, W Ubachs… - Journal of …, 2022 - iopscience.iop.org
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

Material-specific high-resolution table-top extreme ultraviolet microscopy

W Eschen, L Loetgering, V Schuster, R Klas… - Light: Science & …, 2022 - nature.com
Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution
imaging with excellent material contrast, due to the short wavelength and numerous element …

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

L Behnke, R Schupp, Z Bouza, M Bayraktar… - Optics express, 2021 - opg.optica.org
An experimental study of laser-produced plasmas is performed by irradiating a planar tin
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …

Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations

A Sunahara, A Hassanein, K Tomita, S Namba… - Optics …, 2023 - opg.optica.org
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …

[HTML][HTML] The development of laser-produced plasma EUV light source

DK Yang, D Wang, QS Huang, Y Song, J Wu, WX Li… - Chip, 2022 - Elsevier
Extreme ultraviolet lithography (EUVL) has been demonstrated to meet the industrial
requirements of new-generation semiconductor fabrication. The development of high-power …

Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma

J Hernandez-Rueda, B Liu, DJ Hemminga… - Physical Review …, 2022 - APS
We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …

High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model

DJ Hemminga, L Poirier, MM Basko… - Plasma Sources …, 2021 - iopscience.iop.org
We present the results of a joint experimental and theoretical study of plasma expansion
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …

Mass partitioning in fragmenting tin sheets

B Liu, RA Meijer, W Li, J Hernandez-Rueda… - Physical Review …, 2023 - APS
We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …

Anomalous plasma ionization balance induced by and metastable states

N Kimura, Priti, N Numadate, R Kodama, N Nakamura - Physical Review A, 2023 - APS
Metastable states in an atomic energy-level structure greatly influence atomic processes in
plasmas. In particular, high-energy long-lived metastable levels brought about by 5 s and 4 f …