[HTML][HTML] PEDOT: PSS: From conductive polymers to sensors
X Zhang, W Yang, H Zhang, M **e… - … and Precision Engineering …, 2021 - pubs.aip.org
PEDOT: PSS conductive polymers have received tremendous attention over the last two
decades owing to their high conductivity, ease of processing, and biocompatibility. As a …
decades owing to their high conductivity, ease of processing, and biocompatibility. As a …
Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
Material-specific high-resolution table-top extreme ultraviolet microscopy
Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution
imaging with excellent material contrast, due to the short wavelength and numerous element …
imaging with excellent material contrast, due to the short wavelength and numerous element …
Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser
An experimental study of laser-produced plasmas is performed by irradiating a planar tin
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …
Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
[HTML][HTML] The development of laser-produced plasma EUV light source
DK Yang, D Wang, QS Huang, Y Song, J Wu, WX Li… - Chip, 2022 - Elsevier
Extreme ultraviolet lithography (EUVL) has been demonstrated to meet the industrial
requirements of new-generation semiconductor fabrication. The development of high-power …
requirements of new-generation semiconductor fabrication. The development of high-power …
Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma
We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model
DJ Hemminga, L Poirier, MM Basko… - Plasma Sources …, 2021 - iopscience.iop.org
We present the results of a joint experimental and theoretical study of plasma expansion
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …
Mass partitioning in fragmenting tin sheets
We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
Anomalous plasma ionization balance induced by and metastable states
Metastable states in an atomic energy-level structure greatly influence atomic processes in
plasmas. In particular, high-energy long-lived metastable levels brought about by 5 s and 4 f …
plasmas. In particular, high-energy long-lived metastable levels brought about by 5 s and 4 f …