Abstract Machine Learning (ML) is a branch of artificial intelligence that studies algorithms
able to learn autonomously, directly from the input data. Over the last decade, ML …

Research, the universal pursuit of new knowledge, is embarking on a fresh journey into
artificial intelligence (AI). ature reports that AI arose nine places to the fourth-most popular …

Predictive maintenance has been proposed to maximize the overall plant availability of
modern manufacturing systems. To this end, research has been conducted mainly on data …

Abstract Recently, the term “Industry 4.0” has emerged to characterize several Information
Technology and Communication (ICT) adoptions in production processes (eg, Internet‐of …

Virtual metrology (VM) has been employed to improve the performance of advanced process
control for semiconductor manufacturing. A number of VM models have been proposed to …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

The semiconductors are used as various precision components in many electronic products.
Each layer must be inspected of defect after drawing and baking the mask pattern in wafer …

Abstract Industry 4.0 encapsulates methods, technologies, and procedures that transform
data into informed decisions and added value in an industrial context. In this regard …

Thanks to the increasingly high standard of electronics, the semiconductor material science
and semiconductor manufacturing have been booming in the last few decades, with massive …

Soft metrology has been defined as a set of measurement techniques and models that allow
the objective quantification of properties usually determined by human perception such as …