Vapour-phase deposition of two-dimensional layered chalcogenides

T Zhang, J Wang, P Wu, AY Lu, J Kong - Nature Reviews Materials, 2023 - nature.com
Abstract Two-dimensional (2D) layered materials are attracting a lot of attention because of
unique physicochemical properties that are intriguing for both fundamental research and …

Large-Area Epitaxial Growth of Transition Metal Dichalcogenides

G Xue, B Qin, C Ma, P Yin, C Liu, K Liu - Chemical Reviews, 2024 - ACS Publications
Over the past decade, research on atomically thin two-dimensional (2D) transition metal
dichalcogenides (TMDs) has expanded rapidly due to their unique properties such as high …

Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

J Zhu, JH Park, SA Vitale, W Ge, GS Jung… - Nature …, 2023 - nature.com
Abstract Two-dimensional (2D) materials are promising candidates for future electronics due
to their excellent electrical and photonic properties. Although promising results on the wafer …

Large‐Scale Ultra‐Robust MoS2 Patterns Directly Synthesized on Polymer Substrate for Flexible Sensing Electronics

W Li, M Xu, J Gao, X Zhang, H Huang… - Advanced …, 2023 - Wiley Online Library
Synthesis of large‐area patterned MoS2 is considered the principle base for realizing high‐
performance MoS2‐based flexible electronic devices. Patterning and transferring MoS2 …

MoS2‐Based Nanomaterials for Room‐Temperature Gas Sensors

R Kumar, W Zheng, X Liu, J Zhang… - Advanced Materials …, 2020 - Wiley Online Library
In gas sensor technology, current research efforts are focused on develo** a high
performance miniaturized gas sensor operating at room temperature. In recent years …

Substrate Engineering for Chemical Vapor Deposition Growth of Large‐Scale 2D Transition Metal Dichalcogenides

S Li, D Ouyang, N Zhang, Y Zhang, A Murthy… - Advanced …, 2023 - Wiley Online Library
The large‐scale production of 2D transition metal dichalcogenides (TMDs) is essential to
realize their industrial applications. Chemical vapor deposition (CVD) has been considered …

Chemically tailored growth of 2D semiconductors via hybrid metal–organic chemical vapor deposition

Z Zhang, L Hoang, M Hocking, Z Peng, J Hu… - ACS …, 2024 - ACS Publications
Two-dimensional (2D) semiconducting transition-metal dichalcogenides (TMDCs) are an
exciting platform for excitonic physics and next-generation electronics, creating a strong …

Controllable Thin‐Film Approaches for Do** and Alloying Transition Metal Dichalcogenides Monolayers

YC Lin, R Torsi, DB Geohegan, JA Robinson… - Advanced …, 2021 - Wiley Online Library
Abstract Two‐dimensional (2D) transition metal dichalcogenides (TMDs) exhibit exciting
properties and versatile material chemistry that are promising for device miniaturization …

200-mm-wafer-scale integration of polycrystalline molybdenum disulfide transistors

J Kwon, M Seol, J Yoo, H Ryu, DS Ko, MH Lee… - Nature …, 2024 - nature.com
Two-dimensional semiconductors are an attractive material for making thin-film transistors
due to their scalability, transferability, atomic thickness and relatively high carrier mobility …

Atomic layer deposition of large-area polycrystalline transition metal dichalcogenides from 100° C through control of plasma chemistry

M Mattinen, F Gity, E Coleman, JFA Vonk… - Chemistry of …, 2022 - ACS Publications
Two-dimensional transition metal dichalcogenides, such as MoS2, are intensely studied for
applications in electronics. However, the difficulty of depositing large-area films of sufficient …