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A review on laser drilling and cutting of silicon
HJ Wang, T Yang - Journal of the European Ceramic Society, 2021 - Elsevier
Silicon is the most widely used material in numerous fields. Traditional mechanical
machining methods have been unable to meet the higher requirements of processing …
machining methods have been unable to meet the higher requirements of processing …
Laser machining of transparent brittle materials: from machining strategies to applications
X **, debris, large
kerf widths, tapering and high surface roughness or nonuniform surfaces. Laser beam …
kerf widths, tapering and high surface roughness or nonuniform surfaces. Laser beam …