Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

Currently, the technology of microelectromechanical systems is widely used in the
development of high-frequency and ultrahigh-frequency devices. The most important …

In this paper, we present the dual band absorption characteristics of complementary
metamaterial absorber in near infrared (1.3–2.5 μm) region. The dual band absorption is …

This paper reports material selection methodology for radio frequency-micro electro
mechanical systems (RF-MEMS) switches used for reconfigurable antennas. As there are …

This paper investigates the characteristics of a micro-switch that uses two side electrodes to
open a normally closed switch. The side electrodes surround the fixed electrode in the well …

In this paper, the design and fabrication of a new radio frequency (RF)
microelectromechanical system (MEMS) switch structure is presented. This RF MEMS switch …

This Letter presents a systematic evaluation of the adhesion force between sub-micrometer
metal (molybdenum) surfaces in microelectromechanical (MEMS) relays for a range of …

This paper presents an RF microelectromechanical system switched capacitor which is
based on a thin-film alu minum circular beam geometry that exhibits reduced sensitivity to …

Linearity characteristics of capacitive tuners under large radio frequency (RF) power have
become an important issue for today's cellphone industry. The use of these devices as …

Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …