Abstract In the 1990s, Professor Stephen Chou from Princeton University introduced the
concept of nanoimprint lithography, a novel method for manufacturing nanostructures using …

The unique diffractive properties of gratings have made them essential in a wide range of
applications, including spectral analysis, precision measurement, optical data storage, laser …

Although grating interferometers are considered high-performance optical displacement
sensors, higher requirements are being demanded for displacement sensing. Furthermore …

We propose a 3D measurement method based on 2D grating dual-channel and Littrow
equal-optical path incidence to detect the 3D displacement of a 2D grating in the X-, Y-, and …

Traditional grating interferometer with Littrow configuration suffer from low optical
subdivision factor and high grating base surface shape error. To solve these problems, a …

Grating interferometers highly valued for high resolution, straightforward benchmark, and
insensitivity to environmental disturbances have become one of the most mainstream …

A blazed grating interferometer with high-fold optical subdivision is proposed based on the
optical path design of Mach-Zehnder interferometer. In the designed measurement system …

This paper introduces a two-dimensional transmissive grating polarization beam splitter
(PBS) exhibiting exceptional polarization-sensitive properties with high diffraction efficiency …

This paper proposes a straightforward method for measuring micro-displacement
synchronously along two orthogonal axes. A single structure consists of a pair of two …

In this paper, a grating interferometer with higher optical subdivision ability is presented
based on a reasonable configuration for blazed gratings. The proposed grating …