Functionalization of graphene layers and advancements in device applications

KR Nandanapalli, D Mudusu, S Lee - Carbon, 2019 - Elsevier
The invention of graphene, as a two-dimensional (2D) atomic layered material, has created
enormous scientific revolutions in materials science. As a result, there are a variety of 2D …

Wafer‐Scale Integration of Single Layer Graphene Electro‐Absorption Modulators in a 300 mm CMOS Pilot Line

C Wu, S Brems, D Yudistira, D Cott… - Laser & Photonics …, 2023 - Wiley Online Library
Graphene‐based devices have shown great promise for several applications. For graphene
devices to be used in real‐world systems, it is necessary to demonstrate competitive device …

Improvement of Al2O3 Films on Graphene Grown by Atomic Layer Deposition with Pre-H2O Treatment

L Zheng, X Cheng, D Cao, G Wang… - … applied materials & …, 2014 - ACS Publications
We improve the surface of graphene by atomic layer deposition (ALD) without the assistance
of a transition layer or surface functionalization. By controlling gas–solid physical adsorption …

Effective suppression of deep interface states and dielectric trap** in SiNx/GaN metal-insulator-semiconductor structures by a SiOxNy interfacial layer grown by …

K Deng, X Wang, S Huang, Q Jiang, H Yin, J Fan… - Applied Surface …, 2023 - Elsevier
A 3 nm-thick SiO x N y grown by plasma-enhanced atomic layer deposition (PEALD) at 500°
C is utilized as the interfacial layer to suppress the deep interface states and dielectric …

Strong do** reduction on wafer-scale CVD graphene devices via Al2O3 ALD encapsulation

K Dockx, MD Barnes, DJ Wehenkel, R van Rijn… - …, 2024 - iopscience.iop.org
We present the electrical characterization of wafer-scale graphene devices fabricated with
an industrially-relevant, contact-first integration scheme combined with Al 2 O 3 …

Interface Electrical Properties of Al2O3 Thin Films on Graphene Obtained by Atomic Layer Deposition with an in Situ Seedlike Layer

G Fisichella, E Schiliro, S Di Franco… - … applied materials & …, 2017 - ACS Publications
High-quality thin insulating films on graphene (Gr) are essential for field-effect transistors
(FETs) and other electronics applications of this material. Atomic layer deposition (ALD) is …

Application of Molecular Vapour Deposited Al2O3 for Graphene-Based Biosensor Passivation and Improvements in Graphene Device Homogeneity

MM Ali, JJ Mitchell, G Burwell, K Rejnhard, CA Jenkins… - Nanomaterials, 2021 - mdpi.com
Graphene-based point-of-care (PoC) and chemical sensors can be fabricated using
photolithographic processes at wafer-scale. However, these approaches are known to leave …

Clean and less defective transfer of monolayer graphene by floatation in hot water

JW Kim, JY Woo, S Jo, JH Oh, W Hong, BC Lee… - Applied Surface …, 2020 - Elsevier
Monolayer graphene grown by chemical vapor deposition has been intensively studied for
applications such as transparent conductive films, electronic devices, sensors, molecular …