With the rapid commercialization of fifth generation (5G) technology in the world, the market
demand for radio frequency (RF) filters continues to grow. Acoustic wave technology has …

This paper provides a comprehensive review of advanced radio frequency (RF) filter
technologies available in miniature chip or integrated circuit (IC) form for wireless …

Today, acoustic filters are the filter technology to meet the requirements with respect to
performance dictated by the cellular phone standards and their form factor. Around two …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Microwave Film Bulk Acoustic Resonators (FBARs) may be characterized by means of the
Mason transmission line model, but for parameter extraction and design studies, the lumped …

This paper presents the design, fabrication, and characterization of piezoelectric
micromachined ultrasound transducers (PMUTs) based on scandium aluminum nitride (Sc x …

This paper reviews applications of acoustic wave devices in mobile communication. After a
general and historical introduction to bulk acoustic wave (BAW) and surface acoustic wave …

For some time, FBAR technology has lagged behind ceramic technology and surface
acoustic wave resonator (SAW) technology for commercial applications. There were several …

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface
micromachining technology, is described, for which the oscillation frequency is controlled by …