Nanomanufacturing involves scaled-up, reliable, and cost-effective manufacturing of
nanoscale materials, structures, devices, and systems. Nanomanufacturing methods can be …

Thin films covering large surfaces are used in a very wide range of applications from
displays through corrosion resistance, decoration, water proofing, smart windows, adhesion …

In this contribution we demonstrate goniometric scatterometry measurements of gratings
with linewidths down to 25 nm on silicon wafers with an inspection wavelength of 266 nm …

Optical singularities indicate zero-intensity points in space where parameters, such as
phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian …

In wafer metrology, the knowledge of the photomask together with the deposition process
only reveals the approximate geometry and material properties of the structures on a wafer …

Parameter reconstructions are indispensable in metrology. Here, the objective is to explain
K experimental measurements by fitting to them a parameterized model of the measurement …

A mathematical extension of the weak value formalism to the simultaneous measurement of
multiple parameters is presented in the context of an optical focused vector beam …

In this paper we describe how the digital transformation (ie, the adoption of digital
technology) of society affects National Metrology Institutes like VSL. This digital …

Detecting defects on diffraction gratings is crucial for ensuring their performance and
reliability. Practical detection of these defects poses challenges due to their subtle nature …

Scatterometry is an important nonimaging and noncontact method for optical metrology. In
scatterometry certain parameters of interest are determined by solving an inverse problem …