▪ Abstract This chapter presents a review of the technology of scanning thermal microscopy
(SThM) and its applications in thermally probing micro-and nanostructured materials and …

Purpose–The goal of this review paper is to provide information on several commonly used
thermography techniques in semiconductor and micro‐device industry and research today …

We describe a novel approach for calibration of the thermoreflectance coefficient, ideally
suited for measurements in a vacuum thermostat, and present the high temperature …

Using thermoreflectance microscopy with a camera, we have designed a system which
delivers submicronic images of the alternative temperature variations in integrated circuits …

We show that, in thermoreflectance measurements under high focusing conditions, the
signal is not only due to the surface temperature variations. Indeed, the reflected light from …

This work presents a demonstration of the applicability and efficacy of an experimental
system capable of noninvasively and nondestructively scanning the transient surface …

Measuring techniques of the die surface temperature in integrated circuits are reported as
very appropriate for failure analysis, for thermal characterization, and for testing modern …

This paper presents a noncontact optical technique for measuring the thermal contact
conductance between wafer-like thin solid samples. The technique is based on heating one …

The power dissipated by the devices of a circuit can be construed as a signature of the
circuit's performance and state. Without disturbing the circuit operation, this power …

This contribution intends to convince readers that by virtue of the rich physics involved,
optical excitation, thermal diffusion, thermal expansion, and acoustic wave propagation, and …