Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …

This work presents a high-performance Lamé mode resonator with high Q values. The
anchor loss and thermoelastic dam** (TED) were effectively decreased with the optimized …

Parasitic feedthrough capacitances represent a generic issue for capacitively transduced
microelectromechanical resonators. Those parasitic capacitances degrade the output …

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive
accelerometers based on microelectromechanical systems (MEMS). Based on a fully …

Thermoelectric modules that utilize waste heat from machinery are inevitably exposed to
mechanical vibrations. Here, we investigated the effects of mechanically induced phonon …

This paper reports on the design and characterization of a low phase noise MEMS oscillator
with ultra-low polarization voltage. An innovative oscillation circuitry is also proposed by a …

This paper presents a novel Π-shaped bulk acoustic resonator (ΠBAR) with low bias
voltages. Concave flanges were coupled with straight beams to effectively enlarge the …

In this work, a capacitance-to-voltage converter based on a fully-differential transimpedance
amplifier (TIA) with programmable gain and bandwidth for MEMS accelerometers is …

This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating
Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability …

This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …