Progress and comparison in nondestructive detection, imaging and recognition technology for defects of wafers, chips and solder joints

T Fang, J An, Q Chen, Y He, H Wang… - … Testing and Evaluation, 2024 - Taylor & Francis
As an essential part of integrated circuit, chip manufacturing has increasingly demanding
requirements for quality, cost and others. Some technical limitations and the development …

Recent Progress in Printed Photonic Devices: A Brief Review of Materials, Devices, and Applications

AM Al-Amri - Polymers, 2023 - mdpi.com
Printing electronics incorporates several significant technologies, such as semiconductor
devices produced by various printing techniques on flexible substrates. With the growing …

Precisely nanofabricated cross shaped metamaterial absorbers for nearly perfect solar energy harvesting

C Liu, G Duan, B Zhang, Y Liu, D Yang, Y Shuai… - Applied Energy, 2024 - Elsevier
Perfect solar energy absorption is becoming more and more significant in the fields of
carbon neutrality, the numerical study of various metamaterial solar absorbers is boosting …

A framework for detecting unknown defect patterns on wafer bin maps using active learning

JS Shin, MJ Kim, DH Lee - Expert Systems with Applications, 2025 - Elsevier
In a semiconductor manufacturing process, it is important to detect and classify defect
patterns in Wafer Bin Maps (WBMs) and identify the root cause of these defects for tight …

Bright compact ultrabroadband source by orthogonal laser-sustained plasma

Z Shi, S Yang, H Hu, H Lei, Z Yang, X Yu - Light: Science & Applications, 2024 - nature.com
Laser-sustained plasma (LSP) source featuring high brightness and broadband spectral
coverage is found to be powerful in various fields of scientific and industrial applications …

Review of wafer surface defect detection methods

J Ma, T Zhang, C Yang, Y Cao, L **e, H Tian, X Li - Electronics, 2023 - mdpi.com
Wafer surface defect detection plays an important role in controlling product quality in
semiconductor manufacturing, which has become a research hotspot in computer vision …

[HTML][HTML] High-Precision Chromatic Confocal Technologies: A Review

J Li, R Ma, J Bai - Micromachines, 2024 - mdpi.com
Chromatic confocal technology is widely used for precise, steady, and efficient displacement
measurement in many industrial fields. It employs the confocal and dispersion principles to …

Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence

J Liu, J Zhu, Z Yu, X Feng, Z Li, L Zhong… - … Journal of Extreme …, 2024 - iopscience.iop.org
In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …

Enhanced detection of unknown defect patterns on wafer bin maps based on an open-set recognition approach

JS Shin, MJ Kim, BS Kim, DH Lee - Computers in Industry, 2025 - Elsevier
It is crucial to detect and classify defect patterns on wafers in semiconductor-manufacturing
processes for wafer-quality management and prompt analysis of defect causes. In recent …

Nanophotonic inspection of deep-subwavelength integrated optoelectronic chips

Y Che, T Zhang, X Liu, D Hu, S Song, Y Cai, Y Cao… - Science …, 2025 - science.org
Artificial nanostructures with ultrafine and deep-subwavelength features have emerged as a
paradigm-shifting platform to advanced light-field management, becoming key building …