Technical plasmas have a wide range of industrial applications. The Encyclopedia of
Plasma Technology covers all aspects of plasma technology from the fundamentals to a …

Plasma instabilities have been observed in low-pressure inductive discharges, in the
transition between low density capacitively driven and high density inductively driven …

The ion and gas temperatures of inductively coupled plasma discharges, operated with low
nitrogen gas pressures, are studied with optical emission spectroscopy. The nonresolved …

Relaxation oscillations are observed in low-pressure inductive plasma discharges operated
with argon and SF 6 gas mixtures. The data suggest that instabilities may develop …

In low gas pressure radio frequency (RF) capacitive discharges, high energy electrons,
which are responsible for the ionization process, are generated near the RF sheath where …

Electrostatic probe measurements for low-pressure inductively coupled SF6 plasmas are
performed. From the current–voltage (I–V) curves of the probe, the saturation currents of the …

Relaxation oscillations are studied in three low-pressure inductive plasma discharges
operated with argon and sulfur hexafluoride gas mixtures. Two distinct phenomena …

Electrostatic probe measurements for low-pressure inductively coupled SF 6 plasmas are
performed. From the current-voltage (IV) curves of probe, the saturation currents of the …

This report is a Ph. D. dissertation performed under NRA cooperative agreement and
submitted as part of the final report. Asymmetric surface dielectric barrier discharges (DBDs) …

Discharge structures and properties of dual-frequency capacitively-coupled plasma (CCP)
discharges in SF 6 are studied by using a one-dimensional Particle-in-Cell/Monte Carlo …