The status and perspectives of nanostructured materials and fabrication processes for wearable piezoresistive sensors
The wearable sensors have attracted a growing interest in different markets, including
health, fitness, gaming, and entertainment, due to their outstanding characteristics of …
health, fitness, gaming, and entertainment, due to their outstanding characteristics of …
Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature
TiO 2 films were deposited by ALD on Si and glass substrates. FTIR analysis reveals an
incomplete process for deposition temperatures below 160° C. The transition from the …
incomplete process for deposition temperatures below 160° C. The transition from the …
Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching
The growing need for increasingly miniaturized devices has placed high importance and
demands on nanofabrication technologies with high-quality, low temperatures, and low-cost …
demands on nanofabrication technologies with high-quality, low temperatures, and low-cost …
Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times
Considering the potential applications of Al 2 O 3/TiO 2 nanolaminates (ATA NLs) in storage
capacitors, device-grade ATA NLs are fabricated using an ALD system, wherein the effect of …
capacitors, device-grade ATA NLs are fabricated using an ALD system, wherein the effect of …
Thermionic Emission of Atomic Layer Deposited MoO3/Si UV Photodetectors
Ultrathin MoO3 semiconductor nanostructures have garnered significant interest as a
promising nanomaterial for transparent nano-and optoelectronics, owing to their exceptional …
promising nanomaterial for transparent nano-and optoelectronics, owing to their exceptional …
Surface modification of Ti6Al7Nb alloy by Al2O3 nanofilms and calcium phosphate coatings
LMR de Sousa, M das Virgens Santana… - Surface and Coatings …, 2023 - Elsevier
Here we have modified Ti6Al7Nb alloy by Al 2 O 3 using Atomic Layer Deposition (ALD) and
apatite coating electrodeposited and by Simulated Body Fluid method. X-Ray Fluorescence …
apatite coating electrodeposited and by Simulated Body Fluid method. X-Ray Fluorescence …
Understanding and utilizing reactive oxygen reservoirs in atomic layer deposition of metal oxides with ozone
Contrary to idealized depictions, atomic layer deposition (ALD) reactions do not always take
place solely at the gas–solid interface. The iron oxide ALD system was recently shown to …
place solely at the gas–solid interface. The iron oxide ALD system was recently shown to …
[HTML][HTML] Effect of plasma-enhanced atomic layer deposition on oxygen overabundance and its influence on the morphological, optical, structural, and mechanical …
The chemical, structural, morphological, and optical properties of Al-doped TiO2 thin films,
called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition …
called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition …
Area-selective atomic layer deposition (AS-ALD) of low temperature (300° C) cobalt thin film using octadecyltrichlorosilane (ODTS) self-assembled monolayers (SAMs …
C Kim, M Choi, J Sim, H Kim, C Choi - Applied Surface Science, 2024 - Elsevier
As the semiconductor industry advances, manufacturing technologies encounter challenges
in achieving precise alignment and thickness control with smaller and more intricate 3D …
in achieving precise alignment and thickness control with smaller and more intricate 3D …
In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications
C Hwang, YW Kim, J Park, MH Kim, JS Kim… - Journal of Alloys and …, 2024 - Elsevier
This study investigates the viability of TiO 2 as a high-k material in metal-insulator-metal
(MIM) capacitors, essential components influencing semiconductor memory device …
(MIM) capacitors, essential components influencing semiconductor memory device …