Approaches to sustainability in chemical mechanical polishing (CMP): a review
H Lee, H Kim, H Jeong - International Journal of Precision Engineering …, 2022 - Springer
Chemical mechanical polishing (CMP) is an essential planarization process for
semiconductor manufacturing. The application of CMP has been increasing in …
semiconductor manufacturing. The application of CMP has been increasing in …
Nanobubble technologies offer opportunities to improve water treatment
Conspectus Since first hypothesizing the existence of nanobubbles (NBs) in 1994, the
empirical study of NB properties and commercialization of NB generators have rapidly …
empirical study of NB properties and commercialization of NB generators have rapidly …
Incidence of metal-based nanoparticles in the conventional wastewater treatment process
P Cervantes-Avilés, AA Keller - Water research, 2021 - Elsevier
Metal-based nanoparticles (NPs) can be found in wastewater streams, which are significant
pathways for the release of NPs to the environment. Determination of the NPs concentration …
pathways for the release of NPs to the environment. Determination of the NPs concentration …
Adsorptive removal of oil from water using SPIONs–chitosan nanocomposite: kinetics and process optimization
Marine oil spills and petrochemical discharges occurring either naturally or deliberately can
have destructive impacts on environment and economy of a nation. Water bodies …
have destructive impacts on environment and economy of a nation. Water bodies …
Integrated Membrane-adsorption system as a sustainable development approach for semiconductor-industry wastewater treatment
SI Sim, YH Teow - Materials Today: Proceedings, 2023 - Elsevier
Conventional coagulation and flocculation processes applied for semiconductor industry
wastewater treatment contributes to high operating cost due to the use of chemical …
wastewater treatment contributes to high operating cost due to the use of chemical …
Environmental aspects of planarization processes
DE Speed - Advances in chemical mechanical planarization (CMP), 2022 - Elsevier
This chapter describes the occurrence, behavior, and treatment of wastewater that is
produced by the Chemical Mechanical Planarization (CMP) process when it is used to …
produced by the Chemical Mechanical Planarization (CMP) process when it is used to …
Chitosan-polyglycidol complexes to coating iron oxide particles for dye adsorption
A Iovescu, G Stîngă, ME Maxim, M Gosecka… - Carbohydrate …, 2020 - Elsevier
The study sheds light on the interaction between chitosan (Ch) and polyglycidol (PGL) and
uses their interpolymer complex in hydrophilic coating of iron oxide particles (M). Preliminary …
uses their interpolymer complex in hydrophilic coating of iron oxide particles (M). Preliminary …
Biodegradable Polymeric nanocomposites for wastewater treatment
MHA Elella, ES Goda, MA Gab-Allah, SE Hong… - … for environmental and …, 2022 - Springer
Safe drinking water is one of the fundamental necessities for all living being on the earth.
Ever-growing population, industrialization, water sources disorganization, and global …
Ever-growing population, industrialization, water sources disorganization, and global …
Adsorption of iii/v ions (In (iii), Ga (iii) and As (v)) onto SiO 2, CeO 2 and Al 2 O 3 nanoparticles used in the semiconductor industry
X Bi, P Westerhoff - Environmental Science: Nano, 2016 - pubs.rsc.org
The semiconductor industry annually uses thousands of tons of nanoparticles (NPs) in
chemical mechanical polishing (CMP) processes. When III/V materials are processed with …
chemical mechanical polishing (CMP) processes. When III/V materials are processed with …
Physics Based Reliability Analysis of the Silicon Interconnect Fabric
N Shakoorzadeh Chase - 2021 - escholarship.org
Advanced packaging is being driven by the need for computing power, thus, the reliability of
these systems needs to be addressed. The wide range of organic and inorganic materials …
these systems needs to be addressed. The wide range of organic and inorganic materials …