Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting …

KA Cook-Chennault, N Thambi… - Smart materials and …, 2008 - iopscience.iop.org
Power consumption is forecast by the International Technology Roadmap of
Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor …

Piezoelectric micropumps: State of the art review

H Asadi Dereshgi, H Dal, MZ Yildiz - Microsystem Technologies, 2021 - Springer
The purpose of this paper is to present an overview of problems and some research gaps for
better understanding of piezoelectric micropump studies. Micropumps have important and …

Switchable phononic wave filtering, guiding, harvesting, and actuating in polarization-patterned piezoelectric solids

CJ Rupp, ML Dunn, K Maute - Applied Physics Letters, 2010 - pubs.aip.org
We demonstrate the ability to manipulate the propagation of phononic (elastic, acoustic)
waves in two-dimensional piezoelectric solids by spatially patterning the polarization …

Piezoelectric circular diaphragm with mechanically induced pre-stress for energy harvesting

J Palosaari, M Leinonen, J Juuti, J Hannu… - Smart Materials and …, 2014 - iopscience.iop.org
This paper presents the results of a piezoelectric circular diaphragm harvester utilising a
unique measurement setup with tailored input force (walk profile), adjustable mechanical …

[HTML][HTML] Electromechanical behaviour of a finite piezoelectric layer under a flat punch

BBL Wang, JC Han, SY Du, HY Zhang… - International journal of …, 2008 - Elsevier
This paper solves the problem of a smooth and frictionless punch on a piezoelectric ceramic
layer. Different electrical boundary conditions that employ conducting or insulating punches …

Design of ideal circular bending actuators for high performance micropumps

M Herz, D Horsch, G Wachutka, TC Lueth… - Sensors and Actuators A …, 2010 - Elsevier
This paper presents an investigation of ideal geometry and material parameters of piezo-
driven axisymmetric unimorph actuators for micropump applications. Based on Classic …

The electromechanical behavior of piezoelectric thin film composite diaphragms possessing in-plane stresses

BA Griffin, MD Williams, G Wang… - Journal of …, 2017 - iopscience.iop.org
Many piezoelectric microelectromechanical systems (MEMS) measure or generate acoustic
signals via the motion of radially non-uniform, thin film composite plates. The composite …

Effect of electrode size and silicon residue on piezoelectric thin-film membrane actuators

CC Lee, Q Guo, GZ Cao, IY Shen - Sensors and Actuators A: Physical, 2008 - Elsevier
Piezoelectric micro-electromechanical systems (MEMS) often adopt a membrane structure to
facilitate sensing or actuation. Design parameters, such as membrane size, thickness of the …

Topology optimization for wave propagation and vibration phenomena in elastic and piezoelectric solids

CJ Rupp - 2009 - search.proquest.com
Topology optimization is a versatile design tool for the synthesis of heterogeneous
engineering systems where the optimal distribution of constituent materials is sought such …

Finite element analysis of unimorph rectangular piezoelectric diaphragm actuators with experimental verification

C Mo, R Wright, RR Knight… - Smart materials and …, 2012 - iopscience.iop.org
This paper presents a study in which the behavior of clamped unimorph rectangular
piezoelectric diaphragms is analyzed and the importance of electrode patterning for …