Methods and systems for generating simulated output for a specimen are provided. One
method includes acquiring information for a specimen with one or more computer systems …

Asystem and method for semantic segmentation using dense upsampling convolution
(DUC) are disclosed. A particular embodiment includes: receiving an input image; producing …

Methods and systems for accelerated training of a machine learning based model for
semiconductor applications are provided. One method for training a machine learning based …

Methods and systems for aligning images for a specimen acquired with different modalities
are provided. One method includes acquiring information for a specimen that includes at …

Methods and systems for detecting and classifying defects on a specimen are provided. One
system includes one or more components executed by one or more computer sub systems …

(Continued) Primary Examiner—Seyed H Azarian (74) Attorney, Agent, or Firm-Ann Marie
Mewherter (57) ABSTRACT Methods and systems for training a learning based defect …

Methods and systems for training a machine learning model using synthetic defect images
are provided. One system includes one or more components executed by one or more …

Methods and systems for training a neural network for defect detection in low resolution
images are provided. One system includes an inspection tool that includes high and low …

7, 676, 077 B2 3/2010 Kulkarni et al. 7, 729, 529 B2 6/2010 Wu et al. 7, 769, 225 B2 8/2010
Kekare et al. 8, 041, 106 B2 10/2011 Pak et al. 8, 111, 900 B2 2/2012 Wu et al. 8, 126, 255 …

Autoencoder-based, semi-supervised approaches are used for anomaly detection. Defects
on semiconductor wafers can be discovered using these approaches. The model can …