Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

A review on the size-dependent models of micro-beam and micro-plate based on the modified couple stress theory

S Kong - Archives of Computational Methods in Engineering, 2022 - Springer
Micro scale experiments demonstrated that the material deformation behaviors of some
metals and polymers deformed elasticity are size dependence, and the modified couple …

Nonlinear dynamics of nanomechanical beam resonators: improving the performance ofNEMS-based sensors

N Kacem, S Hentz, D Pinto, B Reig, V Nguyen - Nanotechnology, 2009 - iopscience.iop.org
In order to compensate for the loss of performance when scaling resonant sensors down to
NEMS, it proves extremely useful to study the behavior of resonators up to very high …

Review on the modeling of electrostatic MEMS

WC Chuang, HL Lee, PZ Chang, YC Hu - Sensors, 2010 - mdpi.com
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

A large deflection model for the pull-in analysis of electrostatically actuated microcantilever beams

S Chaterjee, G Pohit - Journal of sound and vibration, 2009 - Elsevier
A comprehensive model of an electrostatically actuated microcantilever beam separated
from the ground plane by relatively larger gap is formulated accounting for the nonlinearities …

On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators

FM Alsaleem, MI Younis… - Journal of Micromechanics …, 2009 - iopscience.iop.org
We present modeling, analysis and experimental investigation for nonlinear resonances and
the dynamic pull-in instability in electrostatically actuated resonators. These phenomena are …

Dynamic stability of electrostatically actuated initially curved shallow micro beams

S Krylov, N Dick - Continuum Mechanics and Thermodynamics, 2010 - Springer
Micro and nano devices incorporating bistable structural elements have functional
advantages including the existence of several stable configurations at the same actuation …

Electromechanical Sigma–Delta Modulators ( ) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

F Chen, X Li, M Kraft - IEEE Sensors Journal, 2016 - ieeexplore.ieee.org
Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

An experimental and theoretical investigation of dynamic pull-in in MEMS resonators actuated electrostatically

FM Alsaleem, MI Younis… - Journal of …, 2010 - ieeexplore.ieee.org
We present experimental and theoretical investigations of dynamic pull-in of electrostatically
actuated resonators. Several experimental data are presented, showing regimes of ac …

Snap-action bistable micromechanisms actuated by nonlinear resonance

J Casals-Terre, A Fargas-Marques… - Journal of …, 2008 - ieeexplore.ieee.org
This paper presents analysis, design, realization, and experimental demonstration of a
bistable switch actuated dynamically utilizing mechanical resonance phenomenon. We …