Diffusion of dopants and impurities in β-Ga2O3

R Sharma, ME Law, F Ren, AY Polyakov… - Journal of Vacuum …, 2021 - pubs.aip.org
The understanding and availability of quantitative measurements of the diffusion of dopants
and impurities in Ga 2 O 3 are currently at an early stage. In this work, we summarize what is …

High-performance β-Ga2O3 solar-blind ultraviolet photodetectors epitaxially grown on (110) TiO2 substrates by metalorganic chemical vapor deposition

Y Ma, B Feng, X Zhang, T Chen, W Tang, L Zhang… - Vacuum, 2021 - Elsevier
Abstract High-quality (100)-oriented β-Ga 2 O 3 films were successfully grown on (110) TiO
2 substrates by metalorganic chemical vapor deposition (MOCVD) for the first time. Crystal …

High-quality (001) β-Ga2O3 homoepitaxial growth by metalorganic chemical vapor deposition enabled by in situ indium surfactant

W Tang, Y Ma, X Zhang, X Zhou, L Zhang… - Applied Physics …, 2022 - pubs.aip.org
(001) β-Ga 2 O 3 homoepitaxy on commercially available large-size (001) β-Ga 2 O 3
substrates remains a significant challenge for the wide bandgap semiconductor community …

First‐Principles Study of Twin Boundaries and Stacking Faults in β‐Ga2O3

M Wang, S Mu, JS Speck… - Advanced Materials …, 2025 - Wiley Online Library
This study uses density functional theory calculations to explore the energetics and
electronic structures of planar defects in monoclinic β‐Ga2O3, including twin boundaries …

[HTML][HTML] Indium: A surfactant for the growth of ɛ/κ-Ga2O3 by molecular beam epitaxy

A Karg, A Hinz, S Figge, M Schowalter, P Vogt… - APL Materials, 2023 - pubs.aip.org
The influence of In on the growth of ɛ-Ga 2 O 3 by plasma-assisted molecular beam epitaxy
is investigated. We demonstrate alloying of ɛ-Ga 2 O 3 with In and describe its incorporation …

Epitaxial stabilization of rutile germanium oxide thin film by molecular beam epitaxy

S Chae, H Paik, NM Vu, E Kioupakis… - Applied Physics …, 2020 - pubs.aip.org
Ultrawide bandgap (UWBG) semiconductors (E g> 3 eV) have tremendous potential for
power-electronic applications. The current state-of-the-art UWBG materials such as β-Ga 2 O …

Tunable electronic and optical properties of ferroelectric WS2/Ga2O3 heterostructures

D Wei, Y Li, G Guo, H Yu, Y Ma, Y Tang… - Journal of Physics …, 2023 - iopscience.iop.org
To integrate two-dimensional (2D) materials into van der Waals heterostructures (vdWHs) is
regarded as an effective strategy to achieve multifunctional devices. The vdWHs with strong …

Extending the kinetic and thermodynamic limits of molecular-beam epitaxy utilizing suboxide sources or metal-oxide-catalyzed epitaxy

P Vogt, FVE Hensling, K Azizie, JP McCandless… - Physical Review …, 2022 - APS
We observe a catalytic mechanism during the growth of III-O and IV-O materials by suboxide
molecular-beam epitaxy (S-MBE). By supplying the molecular catalysts In 2 O and SnO we …

Enhanced epitaxial growth of Ga2O3 using an ultrathin SnO2 layer

A Karg, M Kracht, P Vogt, A Messow, N Braud… - Journal of Applied …, 2022 - pubs.aip.org
The tin-enhanced growth of G a 2 O 3 on (0001) A l 2 O 3 by plasma-assisted molecular
beam epitaxy using an ultrathin δ-layer of Sn O 2 is demonstrated. It is shown that this …

Incorporation of Si and Sn donors in β-Ga2O3 through surface reconstructions

M Wang, S Mu, CG Van de Walle - Journal of Applied Physics, 2021 - pubs.aip.org
Tin and silicon incorporate on gallium sites in Ga 2 O 3 and act as shallow donors. The
monoclinic structure of Ga 2 O 3 has two inequivalent Ga sites; density functional theory …