Integration of inductors into high-frequency silicon circuits currently comes at the expense of
a low-quality factor (Q), mainly because of electromagnetic interactions with the underlying …

This work presents a novel die-level post-processing technique for dies including released
movable structures. The procedure was applied to microelectromechanical systems (MEMS) …

The huge growth of MEMS (Micro Electro Mechanical Systems) as well as their presence in
most of our daily used devices aroused our interest on them. At the same time, CMOS …

La conception, le microfabrication, et l'intégration de CMOS des sondes capacitives micro-
électro-mécaniques d'humidité des systèmes (MEMS) sont présentés dans ce travail …

El gran crecimiento de los sistemas MEMS (Micro Electro Mechanical Systems) así como su
presencia en la mayoría de los dispositivos que usamos diariamente despertó nuestro …

Integration of inductors into high-frequency silicon circuits currently comes at the expense of
a low-quality factor (Q), mainly because of electromagnetic interactions with the underlying …