This paper provides a comprehensive review of advanced radio frequency (RF) filter
technologies available in miniature chip or integrated circuit (IC) form for wireless …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium
niobate (LiNbO 3) thin films with electromechanical coupling coefficients (k 2) as large as …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …

This work presents a new class of microelectromechanical system (MEMS) resonator toward
60 GHz for the fifth-generation (5G) wireless communications. The wide range of the …

The 5G communication system has experienced a substantial expansion of the spectrum,
which poses higher requirements to radio frequency (RF) filters in enhancing their operating …

This work presents an acoustic platform using solidly mounted thin-oriented lithium niobate
(LiNbO3) film on silicon (Si). A thin layer of amorphous Si eliminates a conductive layer …

Wafer bonding technology is one of the most effective methods for high-quality thin-film
transfer onto different substrates combined with ion implantation processes, laser irradiation …