Insulated gate and surface passivation structures for GaN-based power transistors

Z Yatabe, JT Asubar, T Hashizume - Journal of Physics D …, 2016 - iopscience.iop.org
Recent years have witnessed GaN-based devices delivering their promise of
unprecedented power and frequency levels and demonstrating their capability as an able …

State of the art on gate insulation and surface passivation for GaN-based power HEMTs

T Hashizume, K Nishiguchi, S Kaneki, J Kuzmik… - Materials science in …, 2018 - Elsevier
In this article, we review recent progress on AlGaN/GaN and InAlN/GaN metal-insulator-
semiconductor high-electron-mobility transistors (MIS-HEMTs) using Al-based oxides, nitride …

GaN-based power devices: Physics, reliability, and perspectives

M Meneghini, C De Santi, I Abid, M Buffolo… - Journal of Applied …, 2021 - pubs.aip.org
Over the last decade, gallium nitride (GaN) has emerged as an excellent material for the
fabrication of power devices. Among the semiconductors for which power devices are …

Characterization of interface states in Al2O3/AlGaN/GaN structures for improved performance of high-electron-mobility transistors

Y Hori, Z Yatabe, T Hashizume - Journal of Applied Physics, 2013 - pubs.aip.org
We have investigated the relationship between improved electrical properties of Al 2 O
3/AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors (MOS-HEMTs) …

Fully vertical GaN-on-Si power MOSFETs

RA Khadar, C Liu, R Soleimanzadeh… - IEEE Electron Device …, 2019 - ieeexplore.ieee.org
We report the first demonstration of fully vertical power MOSFETs on 6.6--thick GaN, grown
on a 6-inch Si substrate by metal-organic chemical vapor deposition. A robust fabrication …

Performance and VTH Stability in E-Mode GaN Fully Recessed MIS-FETs and Partially Recessed MIS-HEMTs With LPCVD-SiNx/PECVD-SiNx Gate Dielectric …

J He, M Hua, Z Zhang, KJ Chen - IEEE Transactions on Electron …, 2018 - ieeexplore.ieee.org
In this paper, we carried out a systematic comparison between the enhancement-mode GaN-
based fully recessed metal-insulator-semiconductor field-effect transistors (MIS-FETs) and …

Status of aluminum oxide gate dielectric technology for insulated-gate GaN-based devices

A Calzolaro, T Mikolajick, A Wachowiak - Materials, 2022 - mdpi.com
Insulated-gate GaN-based transistors can fulfill the emerging demands for the future
generation of highly efficient electronics for high-frequency, high-power and high …

[HTML][HTML] Theoretical study of the influence of GaOx interfacial layer on the GaN/SiO2 interface property

S Hattori, A Oshiyama, K Shiraishi - Journal of Applied Physics, 2024 - pubs.aip.org
The spontaneous formation of a Ga-oxide (GaO x⁠) intermediate layer at the GaN/SiO 2
interface has been reported during the SiO 2 deposition on the GaN substrate. In this study …

Characterization of electronic states at insulator/(Al) GaN interfaces for improved insulated gate and surface passivation structures of GaN-based transistors

Z Yatabe, Y Hori, WC Ma, JT Asubar… - Japanese Journal of …, 2014 - iopscience.iop.org
This paper presents a systematic characterization of electronic states at insulators/(Al) GaN
interfaces, particularly focusing on insulator/AlGaN/GaN structures. First, we review …

Current linearity and operation stability in Al2O3-gate AlGaN/GaN MOS high electron mobility transistors

K Nishiguchi, S Kaneki, S Ozaki… - Japanese Journal of …, 2017 - iopscience.iop.org
To investigate current linearity and operation stability of metal–oxide–semiconductor (MOS)
AlGaN/GaN high electron mobility transistors (HEMTs), we have fabricated and …