Small-scale and distortion-free measurement of electric fields is crucial for applications such
as surveying atmospheric electrostatic fields, lightning research and safeguarding areas …

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately
assessing atmospheric electric fields and high-voltage power lines. Precisely detecting …

This paper describes a new type of electric-field sensor that has been fabricated using
micromachining technology. This micromachined sensor is dramatically smaller than …

To improve the sensitivity and stability, a novel mode-localization resonant MEMS (Micro-
Electro-Mechanical System) electric field sensor based on closed-loop feedback is …

This paper presents a highly sensitive resonant electric field microsensor based on silicon
on insulator (SOI) technology. To improve the electric field coupling effect, the microsensor …

Measurement of the electric fields of high-voltage direct-current (HVDC) transmission lines is
essential for safety and reliability of power systems. However, air breakdown and corona …

This paper presents a compact ac/dc electric field sensor with adjustable sensitivity and
measurement range. The sensor is fabricated using an SOI micromachining process, and …

The design, fabrication and characterization testing of a high-performance micromechanical
resonant electrostatic field sensor at low driving voltages is presented. Structures including …

This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM)
featuring a high quality factor, low driving voltage, low noise, and low power consumption …

We propose a non-invasive, large-bandwidth electro-optic (EO) detection scheme for high-
frequency electric fields using thin-film lithium niobate Mach–Zehnder interferometers. Our …