History of diamond-like carbon films—From first experiments to worldwide applications

K Bewilogua, D Hofmann - Surface and Coatings Technology, 2014 - Elsevier
Diamond-like carbon (DLC) films combine several excellent properties like high hardness,
low friction coefficients and chemical inertness. The DLC coating material can be further …

60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial …

J Vetter - Surface and Coatings Technology, 2014 - Elsevier
Diamond-like carbon (DLC) films deposited by cathodic vacuum arc evaporation (CVAE)
have attracted worldwide interest from research groups and industry since the beginning of …

Properties of diamond-like carbon

J Robertson - Surface and Coatings Technology, 1992 - Elsevier
This paper revies the preparation and properties of hard forms of amorphous carbon and
hydrogenated amorphous carbon, often known as diamond-like carbon. Properties such as …

Hard amorphous (diamond-like) carbons

J Robertson - Progress in Solid State Chemistry, 1991 - Elsevier
The hard forms of amorphous carbon and hydrogenated amorphous carbon, also known as
diamond-like carbon, have recently aroused considerable interest as coating materials. This …

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

PJ Fallon, VS Veerasamy, CA Davis, J Robertson… - Physical Review B, 1993 - APS
A highly tetrahedrally bonded form on nonhydrogenated amorphous carbon (aC) is
produced by deposition from filtered medium-energy ion beams. A range of such films was …

Diamond-like carbon—present status

Y Lifshitz - Diamond and Related materials, 1999 - Elsevier
Hydrogen free diamond-like carbon (DLC) films have been the subject of investigation all
over the world during the past 25years due to the unique combination of their properties that …

[BUKU][B] Handbook of plasma immersion ion implantation and deposition

A Anders - 2000 - researchgate.net
Ion implantation is used extensively in the semiconductor industry to introduce dopant atoms
into wafers to influence electrical performance. This is largely due to the highly reproducible …

Deposition mechanisms for promoting sp3 bonding in diamond-like carbon

J Robertson - Diamond and related materials, 1993 - Elsevier
Deposition of amorphous carbon from medium energy ion beams promotes sp 3, diamond-
like bonding. It is proposed that the sp 3 bonding arises from an increased density, owing to …

Tetrahedral bonding in amorphous carbon

DR McKenzie - Reports on Progress in Physics, 1996 - iopscience.iop.org
Electron configurations close to the tetrahedral hybridization are found in pure amorphous
carbon at a concentration which depends on preparation conditions. Tetrahedral bonding at …

The deposition mechanism of diamond-like aC and aC: H

J Robertson - Diamond and Related Materials, 1994 - Elsevier
Diamond-like carbon (DLC) is a dense, partially sp 3 bonded metastable phase of non-
crystalline carbon or hydrogenated amorphous carbon formed by the deposition from …