[HTML][HTML] Evolution in lithography techniques: microlithography to nanolithography

E Sharma, R Rathi, J Misharwal, B Sinhmar, S Kumari… - Nanomaterials, 2022 - mdpi.com
In this era, electronic devices such as mobile phones, computers, laptops, sensors, and
many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying …

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

A del Campo, C Greiner - Journal of micromechanics and …, 2007 - iopscience.iop.org
SU-8 has become the favourite photoresist for high-aspect-ratio (HAR) and three-
dimensional (3D) lithographic patterning due to its excellent coating, planarization and …

Fabrication approaches for generating complex micro-and nanopatterns on polymeric surfaces

A Del Campo, E Arzt - Chemical reviews, 2008 - ACS Publications
Recent innovations in the area of micro-and nanofabrication have created a unique
opportunity for patterning surfaces with features with lateral dimensions spanning over the …

Ion beam lithography and nanofabrication: a review

F Watt, AA Bettiol, JA Van Kan, EJ Teo… - International Journal of …, 2005 - World Scientific
To overcome the diffraction constraints of traditional optical lithography, the next generation
lithographies (NGLs) will utilize any one or more of EUV (extreme ultraviolet), X-ray, electron …

[HTML][HTML] Nanofabrication through molding

Z Liu, N Liu, J Schroers - Progress in Materials Science, 2022 - Elsevier
Nanomolding usually refers to a top-down fabrication method by which a formable or
moldable material is shaped using a mold of nanoscale dimensions. Nanomolding is the …

[HTML][HTML] Polymers in conventional and alternative lithography for the fabrication of nanostructures

C Acikgoz, MA Hempenius, J Huskens… - European Polymer …, 2011 - Elsevier
This review provides a survey of lithography techniques and the resist materials employed
with these techniques. The first part focuses on the conventional lithography methods used …

[HTML][HTML] Proton beam writing

F Watt, MBH Breese, AA Bettiol, JA van Kan - Materials today, 2007 - Elsevier
Proton beam (p-beam) writing is a new direct-writing process that uses a focused beam of
MeV protons to pattern resist material at nanodimensions. The process, although similar in …

Review of adaptive programmable materials and their bioapplications

X Fan, JY Chung, YX Lim, Z Li… - ACS applied materials & …, 2016 - ACS Publications
Adaptive programmable materials have attracted increasing attention due to their high
functionality, autonomous behavior, encapsulation, and site-specific confinement …

Innovative SU-8 lithography techniques and their applications

JB Lee, KH Choi, K Yoo - Micromachines, 2014 - mdpi.com
SU-8 has been widely used in a variety of applications for creating structures in micro-scale
as well as sub-micron scales for more than 15 years. One of the most common structures …

Macromolecular crowding induced elongation and compaction of single DNA molecules confined in a nanochannel

C Zhang, PG Shao, JA van Kan… - Proceedings of the …, 2009 - pnas.org
The effect of dextran nanoparticles on the conformation and compaction of single DNA
molecules confined in a nanochannel was investigated with fluorescence microscopy. It was …