Silicon photonic platform for passive waveguide devices: materials, fabrication, and applications

Y Su, Y Zhang, C Qiu, X Guo… - Advanced Materials …, 2020 - Wiley Online Library
Silicon photonics has attracted tremendous interest from academia and industry, as the
fabrication of the silicon family of photonic devices is mostly compatible with the …

Review of recent progress on silicon nitride-based photonic integrated circuits

T Sharma, J Wang, BK Kaushik, Z Cheng… - Ieee …, 2020 - ieeexplore.ieee.org
Silicon photonic devices used in the photonics industry over the past three decades have
helped in realizing large-scale photonic integrated circuits. Silicon nitride (Si 3 N 4) is …

Methods to achieve ultra-high quality factor silicon nitride resonators

X Ji, S Roberts, M Corato-Zanarella, M Lipson - APL Photonics, 2021 - pubs.aip.org
On-chip resonators are promising candidates for applications in a wide range of integrated
photonic fields, such as communications, spectroscopy, biosensing, and optical filters, due …

Low-loss Si3N4 TriPleX optical waveguides: Technology and applications overview

CGH Roeloffzen, M Hoekman, EJ Klein… - IEEE journal of …, 2018 - ieeexplore.ieee.org
An overview of the most recent developments and improvements to the low-loss TriPleX Si 3
N 4 waveguide technology is presented in this paper. The TriPleX platform provides a suite …

On-chip dual-comb source for spectroscopy

A Dutt, C Joshi, X Ji, J Cardenas, Y Okawachi… - Science …, 2018 - science.org
Dual-comb spectroscopy is a powerful technique for real-time, broadband optical sampling
of molecular spectra, which requires no moving components. Recent developments with …

Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications

P Muñoz, G Micó, LA Bru, D Pastor, D Pérez… - Sensors, 2017 - mdpi.com
Silicon nitride photonics is on the rise owing to the broadband nature of the material,
allowing applications of biophotonics, tele/datacom, optical signal processing and sensing …

Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics

MHP Pfeiffer, A Kordts, V Brasch, M Zervas… - Optica, 2016 - opg.optica.org
High confinement, integrated silicon nitride (SiN) waveguides have recently emerged as an
attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN …

Platicon microcomb generation using laser self-injection locking

G Lihachev, W Weng, J Liu, L Chang, J Guo… - Nature …, 2022 - nature.com
The past decade has witnessed major advances in the development and system-level
applications of photonic integrated microcombs, that are coherent, broadband optical …

Photonic damascene process for low-loss, high-confinement silicon nitride waveguides

MHP Pfeiffer, C Herkommer, J Liu… - IEEE Journal of …, 2018 - ieeexplore.ieee.org
We report on fabrication of high-confinement and low loss silicon nitride (Si 3 N 4)
waveguides using the photonic Damascene process. This process scheme represents a …

A review of capabilities and scope for hybrid integration offered by silicon-nitride-based photonic integrated circuits

F Gardes, A Shooa, G De Paoli, I Skandalos, S Ilie… - Sensors, 2022 - mdpi.com
In this review we present some of the recent advances in the field of silicon nitride photonic
integrated circuits. The review focuses on the material deposition techniques currently …