Metal‐assisted chemical etching of silicon in oxidizing HF solutions: origin, mechanism, development, and black silicon solar cell application
C Huo, J Wang, H Fu, X Li, Y Yang… - Advanced Functional …, 2020 - Wiley Online Library
Metal‐assisted chemical etching (MacEtch) of silicon in oxidizing hydrofluoric acid (HF)
solutions has emerged as a prominent top‐down micro/nanofabrication approach for a wide …
solutions has emerged as a prominent top‐down micro/nanofabrication approach for a wide …
A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine
Metal-assisted chemical etching (MACE) affords porous silicon nanostructures control over
size, shape, and porosity in a single step. Simplicity and flexibility are potential advantages …
size, shape, and porosity in a single step. Simplicity and flexibility are potential advantages …
[BUCH][B] Materials for advanced packaging
D Lu, CP Wong - 2009 - Springer
With consistently active involvement in the electronic packaging conferences such as the
IEEE Electronic Components and Technology Conference (ECTC) in the last several years …
IEEE Electronic Components and Technology Conference (ECTC) in the last several years …
[HTML][HTML] β-Ga2O3 FinFETs with ultra-low hysteresis by plasma-free metal-assisted chemical etching
In this work, β-Ga 2 O 3 fin field-effect transistors (FinFETs) with metalorganic chemical
vapor deposition grown epitaxial Si-doped channel layer on (010) semi-insulating β-Ga 2 O …
vapor deposition grown epitaxial Si-doped channel layer on (010) semi-insulating β-Ga 2 O …
Nonlithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays
Semiconductor nanowires have potential applications in photovoltaics, batteries, and
thermoelectrics. We report a top-down fabrication method that involves the combination of …
thermoelectrics. We report a top-down fabrication method that involves the combination of …
Formation of high aspect ratio GaAs nanostructures with metal-assisted chemical etching
Periodic high aspect ratio GaAs nanopillars with widths in the range of 500–1000 nm are
produced by metal-assisted chemical etching (MacEtch) using n-type (100) GaAs substrates …
produced by metal-assisted chemical etching (MacEtch) using n-type (100) GaAs substrates …
Effect of catalyst shape and etchant composition on etching direction in metal-assisted chemical etching of silicon to fabricate 3D nanostructures
OJ Hildreth, W Lin, CP Wong - ACS nano, 2009 - ACS Publications
Metal-assisted chemical etching (MaCE) of silicon in conjunction with shaped catalysts was
used to fabricate 3D nanostructures such as slo** channels, cycloids, and spirals along …
used to fabricate 3D nanostructures such as slo** channels, cycloids, and spirals along …
Wet etch, dry etch, and MacEtch of β-Ga2O3: A review of characteristics and mechanism
Abstract β-Ga 2 O 3, a promising ultra-wide bandgap material for future high-power
electronics and deep-ultraviolet optoelectronics applications, has drawn tremendous …
electronics and deep-ultraviolet optoelectronics applications, has drawn tremendous …
Inverse metal-assisted chemical etching produces smooth high aspect ratio InP nanostructures
Creating high aspect ratio (AR) nanostructures by top-down fabrication without surface
damage remains challenging for III–V semiconductors. Here, we demonstrate uniform, array …
damage remains challenging for III–V semiconductors. Here, we demonstrate uniform, array …
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
X Li - Advances in Optics and Photonics, 2011 - opg.optica.org
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
clickable element to expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This …
clickable element to expand a topic LOGIN OR CREATE ACCOUNT PRISM SUBMISSION This …