In this article, a novel two-dimensional nanopositioning platform (NanoPla) design is
described. Its requirements are not only sub-micrometer accuracy for nanotechnology …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

Achieving large motion range (> 1 mm) along with nanometric motion quality (< 10 nm)
simultaneously has been a key challenge in nanopositioning systems. Practical limitations …

Moving magnet actuators (MMAs) are direct-drive, single-phase electromagnetic linear
actuators that provide frictionless and backlash-free motion over a range of several …

A novel parallel-kinematic flexure mechanism that provides highly decoupled motions along
the three translational directions (X, Y, and Z) and high stiffness along the three rotational …

This paper presents the design, modeling, analysis, testing and control of a novel compact
long-stroke precision positioning stage. The stage is devised with leaf flexures to achieve a …

In an effort to replace conventional multistep seeding methods to produce multidimensional
ZnO nanostructures with high spatial occupancy of nanowires (NWs), a rational and facile …

Limited travel stroke constrains the application of existing XYZ parallel micro/nano-
positioning stages. In this paper, a novel parallel-kinematic symmetrical micro/nano …

This paper presents the control system design and tracking performance for a large range
single-axis nanopositioning system that is based on a moving magnet actuator and a flexure …

An innovative and timely guide to the modeling, design and implementation of large-range
compliant micropositioning systems based on flexure hinges Features innovative compact …