Review of additive electrochemical micro-manufacturing technology

X Li, P Ming, S Ao, W Wang - International Journal of Machine Tools and …, 2022 - Elsevier
Additive electrochemical micro-manufacturing (micro-AECM) is a nontraditional fabrication
method which fundamentally employs electrochemical deposition (ECD) mechanism in …

Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and-systems: a review

CK Malek, V Saile - Microelectronics journal, 2004 - Elsevier
The by far leading technology for manufacturing MEMS devices is Si-micromachining with its
various derivatives. However, many applications of microsystems have requirements on …

[LIVRE][B] The RF and microwave handbook

M Golio - 2000 - taylorfrancis.com
The recent shift in focus from defense and government work to commercial wireless efforts
has caused the job of the typical microwave engineer to change dramatically. The modern …

[HTML][HTML] A review of advances in fabrication methods and assistive technologies of micro-structured surfaces

Y Ma, G Zhang, S Cao, Z Huo, J Han, S Ma, Z Huang - Processes, 2023 - mdpi.com
Micro-structured surfaces possess excellent properties of friction, lubrication, drag reduction,
antibacterial, and self-cleaning, which have been widely applied in optical, medical, national …

Microfabrication: LIGA-X and applications

RK Kupka, F Bouamrane, C Cremers, S Megtert - Applied Surface Science, 2000 - Elsevier
X-ray LIGA (Lithography, Electrogrowth, Moulding) is one of today's key technologies in
microfabrication and upcoming modern (meso)-(nano) fabrication, already used and …

3-D construction of monolithic passive components for RF and microwave ICs using thick-metal surface micromachining technology

JB Yoon, BI Kim, YS Choi… - IEEE Transactions on …, 2003 - ieeexplore.ieee.org
As a viable technological option to address today's strong demands for high-performance
monolithic low-cost passive components in RF and microwave integrated circuits (ICs), a …

High-performance air-gap transmission lines and inductors for millimeter-wave applications

I Jeong, SH Shin, JH Go, JS Lee… - IEEE transactions on …, 2002 - ieeexplore.ieee.org
The air-gap transmission lines and inductors are developed by new multilayer process. The
developed transmission lines are air-gap coaxial line, air-gap strip line, air-gap coplanar …

60-GHz air substrate leaky-wave antenna based on MEMS micromachining technology

L Chang, Z Zhang, Y Li, S Wang… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
In this paper, a 60-GHz air substrate leaky-wave antenna based on microelectromechanical
system (MEMS) bulk micromachining is proposed. Using penetration dry etching and gold …

[LIVRE][B] 3D printed electromagnetic transmission and electronic structures fabricated on a single platform using advanced process integration techniques

PI Deffenbaugh - 2014 - search.proquest.com
Abstract 3D printing has garnered immense attention from many fields including in-office
rapid prototy** of mechanical parts, outer-space satellite replication, garage functional …

Liquid Deposition Photolithography for Efficient Three Dimensional Structuring

AC Urness - 2013 - search.proquest.com
Photonic devices increasingly require three dimensional (3D) control of refractive index, but
existing fabrication methods such as femtosecond micromachining, multi-layer planar …