Deep-learning-based fault detection and recipe optimization for a plastic injection molding process under the class-imbalance problem
This paper proposes a supervised learning with a class-balancing loss function (SL-CBL)
approach for fault detection and feature-similarity-based recipe optimization (FSRO) for a …
approach for fault detection and feature-similarity-based recipe optimization (FSRO) for a …
DeepSEM-Net: Enhancing SEM defect analysis in semiconductor manufacturing with a dual-branch CNN-Transformer architecture
Y Qiao, Z Mei, Y Luo, Y Chen - Computers & Industrial Engineering, 2024 - Elsevier
Due to the increasing complexity of modern semiconductor integrated circuit fabrication
processes, various defects may occur at each process step, leading to a semiconductor …
processes, various defects may occur at each process step, leading to a semiconductor …
TripletMatch: Wafer Map Defect Detection Using Semi-Supervised Learning and Triplet Loss with Mixup
C Lim, Y Hur - IEEE Access, 2024 - ieeexplore.ieee.org
In the semiconductor manufacturing process, Electrical Die Sorting (EDS) is a post-
production process used to assess the quality of each chip on the wafer. The results from …
production process used to assess the quality of each chip on the wafer. The results from …