Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …
and exploited in the past few decades for various applications and for probing fundamental …
State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review
V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
Nonlinearity enhanced mode localization in two coupled MEMS resonators
As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered
considerable attention in areas such as vibration control, sensing, etc. This paper …
considerable attention in areas such as vibration control, sensing, etc. This paper …
A sensitivity tunable accelerometer based on series-parallel electromechanically coupled resonators using mode localization
This paper reports a novel mode-localized resonant accelerometer, which can keep high
sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four …
sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four …
Mode coupling in electromechanical systems: Recent advances and applications
ML Guo, JW Fang, JF Chen, BL Li… - Advanced Electronic …, 2023 - Wiley Online Library
Mode interactions have recently become the focus of intense research in micro/
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …
A closed-loop mode-localized accelerometer
J Yang, J Zhong, H Chang - Journal of Microelectromechanical …, 2018 - ieeexplore.ieee.org
This paper reports a closed-loop mode-localized accelerometer for the first time. The
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …
Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements
NF Morozov, DA Indeitsev, VS Igumnova… - International Journal of …, 2022 - Elsevier
In the presented work, a model of a microelectromechanical accelerometer with two
microbeam sensing elements located between two fixed electrodes is proposed. The action …
microbeam sensing elements located between two fixed electrodes is proposed. The action …
A high resolution differential mode-localized MEMS accelerometer
A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS
accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a …
accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a …
A high-performance mode-localized accelerometer employing a quasi-rigid coupler
An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …
Theoretical and experimental investigations of the crossover phenomenon in micromachined arch resonator: part I—linear problem
We investigate, experimentally and theoretically, the linear mode coupling between the first
symmetric and antisymmetric modes of an electrothermally tuned and electrostatically …
symmetric and antisymmetric modes of an electrothermally tuned and electrostatically …